A Nichelatti | TU Delft Repository

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A Nichelatti

Conference paper (2)

2 records found

1

High aspect ratio through-wafer interconnections for 3D-microsystems

Conference paper (2003) - L Wang (author) , A Nichelatti (author) , H Schellevis (author) , Charles De Boer (author) , C.C.G. Visser (author) , NT Nguyen (author) , PM Sarro (author)

Realization of high aspect ratio interconnections based on macroporous silicon

Conference paper (2002) - A Nichelatti (author) , NT Nguyen (author) , PM Sarro (author)