Proportional Microvalve Using A Piezoelectric Unimorph Microactuator

Conference Paper (2019)
Authors

Arun Gunda (Student TU Delft)

G. Özkayar (TU Delft - Micro and Nano Engineering)

M. Tichem (TU Delft - Micro and Nano Engineering)

M. K. Ghatkesar (TU Delft - Micro and Nano Engineering)

Research Group
Micro and Nano Engineering
Copyright
© 2019 Arun Gunda, G. Özkayar, M. Tichem, M.K. Ghatkesar
More Info
expand_more
Publication Year
2019
Language
English
Copyright
© 2019 Arun Gunda, G. Özkayar, M. Tichem, M.K. Ghatkesar
Research Group
Micro and Nano Engineering
Pages (from-to)
45-48
Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Abstract

Microvalves are important flow-control components in many standalone and integrated microfluidic circuits. Although there is a large body of work regarding
microvalves, there is still a need for an easyto-fabricate, small-footprint, low-power device that can control both liquids and gases at moderate pressures. This paper details the development of a piezoelectric microvalve compatible with both liquids and gases with a maximum driving pressure of 1 bar. A novel combination of accessible methods like 3D-printing and lasercutting has been used to realize this device. The device has a flow range of 0 - 90 μL min−1 at 1 bar inlet pressure. When fully closed, a leakage of 0.8% open-flow was measured with a power consumption of 37.5 μW.

Files

MFHS.pdf
(pdf | 1.13 Mb)
License info not available