Proportional Microvalve Using A Piezoelectric Unimorph Microactuator

Conference paper (2019)

Authors

Arun Gunda Student
G. Özkayar Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
M. Tichem Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
M.K. Ghatkesar Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
Research Group
Micro and Nano Engineering (Mechanical, Maritime and Materials Engineering) (TU Delft)
Copyright: © 2019 Arun Gunda, G. Özkayar, M. Tichem, M.K. Ghatkesar
3D-printing Piezoelectric Microvalve Unimorph Proportional
More Info
expand_more

Published Date

2019

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Micro and Nano Engineering

Abstract

Microvalves are important flow-control components in many standalone and integrated microfluidic circuits. Although there is a large body of work regarding
microvalves, there is still a need for an easyto-fabricate, small-footprint, low-power device that can control both liquids and gases at moderate pressures. This paper details the development of a piezoelectric microvalve compatible with both liquids and gases with a maximum driving pressure of 1 bar. A novel combination of accessible methods like 3D-printing and lasercutting has been used to realize this device. The device has a flow range of 0 - 90 μL min−1 at 1 bar inlet pressure. When fully closed, a leakage of 0.8% open-flow was measured with a power consumption of 37.5 μW.

Files

MFHS.pdf
(.pdf | 1.13 Mb)