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A MEMS Coriolis Mass Flow Sensing System with Combined Drive and Sense Interface

Conference Paper (2019)
Author(s)

A. C. De Oliveira (TU Delft - Applied Sciences)

T. V.P. Schut (University of Twente)

J. Groenesteijn (University of Twente)

Q. Fan (University of Twente)

R. J. Wiegerink (University of Twente)

K. A.A. Makinwa (TU Delft - Electrical Engineering, Mathematics and Computer Science)

Faculty
Industrial Design Engineering
DOI related publication
https://doi.org/10.1109/SENSORS43011.2019.8956695 Final published version
More Info
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Publication Year
2019
Language
English
Faculty
Industrial Design Engineering
Volume number
2019-October
Article number
8956695
ISBN (electronic)
9781728116341
Event
18th IEEE Sensors, SENSORS 2019 (2019-10-27 - 2019-10-30), Montreal, Canada
Downloads counter
222
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Abstract

This paper describes an interface circuit for a MEMS Coriolis mass flow sensor that combines both drive and sense circuitry. The MEMS sensor consists of a suspended resonant tube, which is read-out by comb capacitors and driven into oscillation by current flowing through a drive coil in a magnet field. The interface circuit comprises a low-noise front-end that performs capacitance-to-voltage (C/V) conversion, and a drive-loop with automatic amplitude control. Drive motion can also be detected from the output of the front-end, allowing both drive and sense functions to be combined. The front-end is chopped to mitigate its 1/ f noise. When implemented with commercial off-the-shelf (COTS) components, the proposed interface draws 250 mA from a single 5-V supply. Mass flow measurements with Nitrogen gas (N2) show that the sensor's drive frequency drifts by less than 1 mHz (rms) per hour, while its zero stability is less than 2.6 mg/h during an 80s measurement.