Mechanical Characterization Analysis of a Segmented Silicon Layer on Ultra-thin Polyimide Substrates by Experiment and FE Simulation
Conference Paper
(2006)
Author(s)
L Wang (TU Delft - Micro and Nano Engineering)
Kasper Jansen (TU Delft - Computational Design and Mechanics)
Marian Bartek (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
A Polyakov (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
LJ Ernst (TU Delft - Computational Design and Mechanics)
Research Group
Micro and Nano Engineering
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https://resolver.tudelft.nl/uuid:8af74cf6-2162-4d40-81b3-9df67d8d6642
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Publication Year
2006
Research Group
Micro and Nano Engineering
Pages (from-to)
1-6
ISBN (print)
1-4244-0276X
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