An experimental setup to prove the MAPPER electron lithography concept.

Conference paper (1999)

Authors

BJ Kampherbeek ImPhys/Charged Particle Optics
MJJ Wieland ImPhys/Charged Particle Optics
P. Kruit ImPhys/Charged Particle Optics
Research Group
ImPhys/Charged Particle Optics
More Info
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Published Date

1999

Language

Undefined/Unknown

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Research Group

ImPhys/Charged Particle Optics