An experimental setup to prove the MAPPER electron lithography concept.
Conference Paper
(1999)
Author(s)
BJ Kampherbeek (TU Delft - ImPhys/Charged Particle Optics)
MJJ Wieland (TU Delft - ImPhys/Charged Particle Optics)
P Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:8ed81d19-cbb1-4318-bdfc-7ea1ff891eb3
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Publication Year
1999
Research Group
ImPhys/Charged Particle Optics
Pages (from-to)
19-20
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