Single step IC-compatible processing of inertial sensors using SF6-O2 cryogenic plasma process
Conference Paper
(2004)
Author(s)
G Craciun (TU Delft - Electronic Instrumentation)
H Yang (TU Delft - Electronic Instrumentation)
L.S. Pakula (TU Delft - Electronic Instrumentation)
E.W.J.M. van der Drift (TU Delft - QN/Kavli Nanolab Delft)
Pim J. French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:8f84306d-c879-4e51-aabf-86ecf29bf622
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Publication Year
2004
Research Group
Electronic Instrumentation
Bibliographical Note
ed. is niet bekend@en
Pages (from-to)
174-178
ISBN (print)
4-88686-000-1
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