Smooth and narrow nanopillars fabricated by ion-beam-induced deposition under charging conditions
Journal Article
(2008)
Author(s)
P Chen (QN/High Resolution Electron Microscopy)
Huub Salemink (TU Delft - QN/Photronic Devices)
Paul F.A. Alkemade (TU Delft - QN/Kavli Nanolab Delft)
To reference this document use:
https://resolver.tudelft.nl/uuid:91a37864-8420-4dd4-ab1b-6b0e41cf733b
More Info
expand_more
expand_more
Publication Year
2008
Issue number
10
Volume number
47
Pages (from-to)
8120-8123
No files available
Metadata only record. There are no files for this record.