Smooth and narrow nanopillars fabricated by ion-beam-induced deposition under charging conditions

Chen, P; Salemink, H.W.M.; Alkemade, Paul

Smooth and narrow nanopillars fabricated by ion-beam-induced deposition under charging conditions

Journal article (2008)

Authors

P Chen

H.W.M. Salemink QN/Photronic Devices

Paul Alkemade QN/Kavli Nanolab Delft

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Published Date

2008

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