A thin-SOI micromachined quasi-digital accelerometer
Conference Paper
(2008)
Author(s)
L Pakula (TU Delft - Electronic Instrumentation)
V. Rajaraman (TU Delft - Electronic Instrumentation)
PJ French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:91ad6bad-f460-463f-8842-d2eb0219b976
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Publication Year
2008
Research Group
Electronic Instrumentation
Pages (from-to)
201-205
ISBN (print)
978-3-00-025217-4
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