Porous Graphene-Based Flexible On-Chip Microsupercapacitors Enabled by Chitosan Oligosaccharide Laser Lithograph
Qian Ming Huang (Harbin Institute of Technology, Southern University of Science and Technology )
Huiru Yang (Southern University of Science and Technology , Harbin Institute of Technology)
Shaogang Wang (Southern University of Science and Technology , TU Delft - Bio-Electronics)
G.Q. Zhang (TU Delft - Electronic Components, Technology and Materials)
P. J. French (TU Delft - Bio-Electronics)
H.Y. Ye (Southern University of Science and Technology , TU Delft - Electronic Components, Technology and Materials)
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Abstract
This research introduces a novel and convenient technology, chitosan oligosaccharide laser lithography (COSLL), enabling the creation of flexible laser-induced graphene (LIG) on-chip microsupercapacitors (MSCs) using environmentally friendly chitosan-class polymers for the first time. MSCs prepared through COSLL exhibit a significant areal capacitance exceeding 4 mF cm-2, comparable to that of the polyimide-LIG-based counterparts. COSLL seamlessly integrates with the micro-nano thin-film process, allowing the capacitance of resulting LIG/Au MSCs to be further increased to about 8 mF cm-2. Leveraging an eco-friendly biomass carbon source and featuring a convenient process flowchart, COSLL emerges as an appealing method for fabricating flexible LIG on-chip MSCs.