Reflection Ptychography via Auto Differentiation on a High Harmonic EUV beamline

Conference Paper (2022)
Author(s)

Sven Weerdenburg (TU Delft - ImPhys/Coene group)

Y. Shao (TU Delft - ImPhys/Optics)

Jacob Seifert (Debye Institute)

R. Horsten (TU Delft - ImPhys/Optics)

Wim Coene (ASML, TU Delft - ImPhys/Optics)

Research Group
ImPhys/Optics
Copyright
© 2022 S. Weerdenburg, Y. Shao, Jacob Seifert, R.C. Horsten, W.M.J.M. Coene
More Info
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Publication Year
2022
Language
English
Copyright
© 2022 S. Weerdenburg, Y. Shao, Jacob Seifert, R.C. Horsten, W.M.J.M. Coene
Research Group
ImPhys/Optics
ISBN (electronic)
978-195717106-7
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Abstract

We demonstrate our beamline using a table-top HHG EUV source for lensless imaging application in reflection m ode. T he s ample r eflection fu nction is reconstructed using an auto-differentiation based ptychographic algorithm built on TensorFlow platform.

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