Reflection Ptychography via Auto Differentiation on a High Harmonic EUV beamline
Sven Weerdenburg (TU Delft - ImPhys/Coene group)
Yifeng Shao (TU Delft - ImPhys/Optics)
Jacob Seifert (Debye Institute)
Roland Horsten (TU Delft - ImPhys/Optics)
Wim Coene (ASML, TU Delft - ImPhys/Optics)
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Abstract
We demonstrate our beamline using a table-top HHG EUV source for lensless imaging application in reflection m ode. T he s ample r eflection fu nction is reconstructed using an auto-differentiation based ptychographic algorithm built on TensorFlow platform.