Coherent Fourier Scatterometry (CFS) is a powerful optical metrology technique for the precise characterisation of nanostructures. Conventional CFS systems rely on piezo-based scanning stages for raster scanning, which limits throughput due to slow scanning speeds. In this work, we present a high-speed CFS system incorporating a galvanometric (galvo) mirror for beam scanning. This approach significantly enhances scanning speed while maintaining measurement accuracy. Although galvo mirrors are widely used in optical systems, their implementation in CFS has unique challenges such as off-axis beam aberrations and angle-dependent beam shifts at the split detector. These issues are analysed and mitigated through optical design, alignment and system calibration. Additionally, we derive the minimum detector bandwidth required to capture high-frequency signals generated by the fast scanning. The effectiveness of the system is demonstrated through the calibration of pits with various diameters that are etched onto a silicon wafer. Results show a substantial improvement in scanning speed as compared with piezo-based systems without compromising measurement precision, making this approach highly suitable for high-throughput metrology applications.

We demonstrate the implementation of a compact schlieren imaging technique for quantitatively measuring atomic density profiles in a gas jet-based high harmonic generation EUV source. This technique compares high harmonic generation light sources and optimization, considering different nozzle geometries, backing pressures, and vacuum systems. The simplicity of schlieren imaging could make it a suitable standardized inspection tool for gas jet-based high harmonic generation sources. Several gas jet profiles at different backing pressures were analyzed, enabling the retrieval of the peak pressure within the gas jet and the impact of the vacuum system on the jets' shape.

We present a highly stable, easy-to-use HHG source delivering a record photon flux of >10¹¹ photons/s at 69eV-75eV, being tunable to approx. 100eV which will be used for future photon-hungry applications.

We demonstrate our beamline using a table-top HHG EUV source for lensless imaging application in reflection m ode. T he s ample r eflection fu nction is reconstructed using an auto-differentiation based ptychographic algorithm built on TensorFlow platform.

A new method for fast, high resolution interrogation of an array of photonic sensors is proposed. The technique is based on the integrated Fourier transform (FT) interrogator previously introduced by the authors. Compared to other interferometric interrogators, the FT-interrogator is very compact and has an unprecedented tolerance to variations in the nominal values of the sensors’ resonance wavelength. In this paper, the output voltages of the interrogator are written as a polynomial function of complex variables whose modulus is unitary and whose argument encodes the resonance wavelength modulation of the photonic sensors. Two different methods are proposed to solve the system of polynomial equations. In both cases, the Gröbner basis of the polynomial ideal is computed using lexicographical monomial ordering, resulting in a system of polynomials whose complex variable contributions can be decoupled. Using an NVidia graphics processing card, the processing time for 1 026 000 systems of algebraic equations takes around 9 ms, which is more than two orders of magnitude faster than the interrogation method previously introduced by the authors. Such a performance allows for real time interrogation of high-speed sensors. Multiple solutions satisfy the algebraic system of equations, but, in general, only one of the solutions gives the actual resonance wavelength modulation of the sensors. Other solutions have been used for optimization, leading to a reduction in the cross-talk among the sensors. The dynamic strain resolution is 1.66 nε/√Hz.

High-harmonic generation (HHG) driven by ultrashort laser pulses is an established process for the generation of coherent extreme ultraviolet (XUV) to soft X-ray radiation, which has found widespread use in various applications [1]. In recent years photon-hungry applications such as coherent diffractive imaging [2] , [3] and applications based on statistical analysis [3] have required more powerful HHG sources, in particular, at high repetition rates. This need can be addressed by using high average power fiber lasers as the HHG drivers [4]. Here, we present a HHG-based XUV source, capable of providing a large photon flux across a wide range between 66 eV and 150 eV. It is driven by a commercial XUV beamline from Active Fiber Systems GmbH consisting of 100-W average power fiber-laser system, delivering up to 300J at <300-fs pulse duration. For HHG this system is operated at 100 W, 600 kHz. A post-compression unit is part of the device to shorten the pulses to ~35 fs, the average power remains at 63W. The turnkey source can provide unprecedented photon fluxes of >10 11 photons/s in each harmonic between 69 eV and 75 eV (HH57-HH63). All fluxes are given at the generation point, i.e. directly after the source.

Coherent Fourier scatterometry (CFS) has been introduced to fulfil the need for noninvasive and sensitive inspection of subwavelength nanoparticles in the far field. The technique is based on detecting the scattering of coherent light when it is focused on isolated nanoparticles. In the present work, we describe the results of an experimental study aimed at establishing the actual detection limits of the technique, namely the smallest particle that could be detected with our system. The assessment for particles with a diameter smaller than 40 nm is carried out using calibrated nano-pillars of photoresist on silicon wafers that have been fabricated with e-beam lithography. We demonstrate the detection of polystyrene equivalent nanoparticles of diameter of 21 nm with a signal-to-noise ratio of 4 dB using the illuminating wavelength of 405 nm.

We report a highly sensitive ultrasound sensor based on an integrated photonics silicon Mach-Zehnder interferometer (MZI). One arm of the MZI is located on a thin membrane, acting as the sensing part of the device. Ultrasound waves excite the membrane's vibrational mode, thus inducing modulation of the MZI transmission. The measured sensor transfer function is centered at 0.47 MHz and has a -6 dB bandwidth of 21.2%. For 1.0 mW optical input power, we obtain a high sensitivity of 0.62 mV/Pa, a low detection limit of 0.38 mPa/Hz^1/2 at the resonance frequency and a large dynamic range of 59 dB. In preliminary ultrasound imaging experiments using this sensor, an image of a wire phantom is obtained. The properties of this sensor and the generated image show that this sensor is very promising for ultrasound imaging applications.

In this paper, the design and the characterization of a novel interrogator based on integrated Fourier transform (FT) spectroscopy is presented. To the best of our knowledge, this is the first integrated FT spectrometer used for the interrogation of photonic sensors. It consists of a planar spatial heterodyne spectrometer, which is implemented using an array of Mach-Zehnder interferometers (MZIs) with different optical path differences. Each MZI employs a 3_3 multi-mode interferometer, allowing the retrieval of the complex Fourier coefficients. We derive a system of non-linear equations whose solution, which is obtained numerically from Newton's method, gives the modulation of the sensor's resonances as a function of time. By taking one of the sensors as a reference, to which no external excitation is applied and its temperature is kept constant, about 92% of the thermal induced phase drift of the integrated MZIs has been compensated. The minimum modulation amplitude that is obtained experimentally is 400 fm, which is more than two orders of magnitude smaller than the FT spectrometer resolution.

Coherent Fourier Scatterometry (CFS) is a scanning optical technique that is particularly suitable for nanoparticle detection. Inspection of wafer surfaces is one of the critical bottle-necks for high yield in the production of semiconductor chips. Ideally, inspection systems are required to work fast, be sensitive, and should not thermally damage the samples with an excess of illuminating light power. The sensitivity of detection of nanoparticles, attributed to the smallest size of the scatterer that can be detected, is severely limited by noise. The optical readout of the scatterometer consists of a bi-cell (a split photodetector) that collects the scatterred light from the surface to be inspected while the latter is scanned in the lateral direction (2D scan). The difference voltage signal resulting from integrating and subtracting the two halves of the bi-cell is recorded as a function of the lateral scanning position of the sample surface. The bi-cell has two functions: first, it allows us to acquire signals in a fast manner, and second, it eliminates effects due to substrate spurious reflections, which is usually a big issue in dark field based particle detection systems. In this paper, we present an extension of the original CFS detection system by incorporating a heterodyne technique to the detection system. We show the implementation of the new detector system as well as a comparative signal-to-noise ratio (SNR) gain studies that are used to determine the suitable frequencies and waveforms for both modulation and reference signals. We demonstrate the detection of polystyrene nanoparticles with a diameter of 80 nm, which were deposited on top of a silicon wafer, with high SNR at low illuminating light power. The experiments were performed with a diode laser at the wavelength of 405 nm. In this particular particle size, we have observed an improvement of the SNR of about 45 dB as compared to the original detection system of the CFS. Although the proposed heterodyne CFS technique already shows excellent performance for detection of polystyrene nanoparticles on silicon wafer, there is still room for improving the sensitivity towards even smaller particles, as discussed in the outlook and conclusions section.

We present a compact integrated photonics interrogator for a ring-resonator (RR) ultrasound sensor, the so-called MediGator. The MediGator consists of a special light source and an InP Mach-Zehnder interferometer (MZI) with a 3 × 3 multi-mode interferometer. Miniaturization of the MZI to chip size enables high temperature stability and negligible signal drift. The light source has a −3 dB bandwidth of 1.5 nm, a power density of 9 dBm/nm and a tuning range of 5.7 nm, providing sufficient signal level and robust alignment for the RR sensor. The mathematical procedure of interrogation is presented, leading to the optimum MZI design. We measure the frequency response of the sensor using the MediGator, giving a resonance frequency of 0.995 MHz. Further, high interrogation performance is demonstrated at the RR resonance frequency for an ultrasound pressure range of 1.47 − 442.4 Pa, which yields very good linearity between the pressure and the resulting modulation amplitude of the RR resonance wavelength. The measured signal time traces match well with calculated results. Linear fitting of the pressure data gives a sensor sensitivity of 77.2 fm/Pa. The MediGator provides a low detection limit, temperature robustness and a large measurement range for interrogating the RR ultrasound sensor.

A highly sensitive ultrasound sensor based on an integrated photonics Mach–Zehnder interferometer (MZI) fabricated in silicon-on-insulator technology is reported. The sensing spiral is located on a membrane of size 121 μm × 121 μm. Ultrasound waves excite the membrane’s vibrational mode, which translates to modulation of the MZI transmission. The measured sensor transfer function is centered at 0.47 MHz and has a −6 dB bandwidth of 21.2%. The sensor sensitivity is linear in the optical input power and reaches a maximum 0.62 mV/Pa, which is limited by the interrogation method. At 0.47 MHz and for an optical power of 1.0 mW the detection limit is 0.38 mPa∕Hz ¹ ∕ ² and the dynamic range is 59 dB. The MZI’s gradual transmission function allows a wide range of wavelength operation points. This strongly facilitates sensor use and is promising for applications.