Authored
11 records found
Coating layer on samples with roughness
Numerical study for coherent Fourier scatterometry
For the development of integrated circuits, the accompanying metrology inside the fabrication process is essential. Non-imaging metrology of nanostructure has to be quick and non-destructive. The multilayers are crucial components of today's microprocessor nanostructures and r ...
Coherent Fourier scatterometry
A holistic tool for inspection of isolated particles or defects on gratings
It has been a widely growing interest in using silicon carbide (SiC) in high-power electronic devices. Yet, SiC wafers may contain killer defects that could reduce fabrication yield and make the device fall into unexpected failures. To prevent these failures from happening, it ...
The analysis of 2D scattering maps generated in scatterometry experiments for detection and classification of nanoparticles on surfaces is a cumbersome and slow process. Recently, deep learning techniques have been adopted to avoid manual feature extraction and classification ...
Coherent Fourier scatterometry (CFS) has been introduced to fulfil the need for noninvasive and sensitive inspection of subwavelength nanoparticles in the far field. The technique is based on detecting the scattering of coherent light when it is focused on isolated nanoparticl ...
Contributed
1 records found
Scatterometry data in order to quickly and reliably detect nanoparticles on
surfaces. An introduction to deep learning is followed by a review of the
experimental setup and used software. After ...