The sidewall angle (SWA) of a nanostructure exerts influence on the performance of the nanostructure and plays an important role in processing nano-structural chips. It is still a great challenge to determine steep SWAs from far field measurements especially when the SWAs are close to 90°. Here, we propose a far-field detection system to determine steep SWA of a cliff-shape step structure on a silicon substrate by combining a split detector with a scanning method. The far-field radiation field is asymmetric due to the scattering of the step structure, and further numerical analysis demonstrates the reliability of this far-field measurement method. In the simulations, two key variables, i.e. the polarization state and the focus position of the incident laser beam, are considered to explore their impacts. By scanning over the structure laterally and longitudinally with both TE and TM polarizations, polarization effects on the far-field occur. These effects show higher sensitivity to steep SWA variation for TM polarization as compared to TE. Furthermore, with a comprehensive longitudinal scanning analysis for the TM polarization case, a feasible focus interval can be optimized to retrieve the steep SWA. As the proposed method is fast, highly sensitive and easy to implement, it provides a powerful approach to investigate the scattering behavior of nanostructures.

Nonzero transverse energy flow, which describes phenomenon in which the energy flux of localized light propagates in a plane perpendicular to the optical axis, has attracted enormous interest recently due to its useful application in micromanipulation. We show that the appearance of transverse energy flow in the focal plane of an aplanatic high numerical aperture focusing system is possible. We demonstrate our approach by specially tailoring the input state of polarization. Calculations reveal that number of transverse energy flow rings is controllable and depend on azimuthal index of the input field, thereby giving rise to tunable manipulating locations in optical trapping.

Lateral resolution enhancement is demonstrated in a confocal imaging system with amplitude-modulated radially polarized (RP) light at the wavelength Annular pupil fields and optimized amplitude distribution functions can be realized with a spatial light modulator. By comparing images obtained with full and amplitude modulated apertures of RP illuminations using a high numerical aperture (NA = 0.9), spatial resolution of has been achieved experimentally. This result agrees very well with theoretical simulation results and will be helpful in improving performance of the non-fluorescent imaging systems.

We report a novel method of focus determination with high sensitivity and submicrometre accuracy. The technique relies on the asymmetry in the scattered far field from a nanosphere located at the surface of interest. The out-of-focus displacement of the probing beam manifests itself in imbalance of the signal of the differential detector located at the far field. Up-down scanning of the focussed field renders an error S-curve with a linear region that is slightly bigger than the corresponding vectorial Rayleigh range. We experimentally show that the focus can be determined not only for a surface with high optical contrast, such as a silicon wafer, but also for a weakly reflecting surface, such as fused silica glass. Further, for the probing wavelength of 405 nm, three sizes of polystyrene latex spheres, namely 200, 100, and 50 nm in diameter, are tested. Higher sensitivity was obtained as the sphere diameter became smaller. However, due to the fact that the scattering cross-section decreases as the sixth power of the nanosphere diameter, we envision that further size reduction of the studied sphere would not contribute to a drastic improvement in sensitivity. We believe that the proposed method can find applications in bio/nano detection, micromachining, and optical disk applications.

Improving the image quality of small particles is a classic problem and especially challenging when the distance between particles are below the optical diffraction limit. We propose a imaging system illuminated with radially polarized light combined with a suitable substrate that contains a thin dielectric layer to demonstrate that the imaging quality can be enhanced. The coupling between the evanescent wave produced in a designed thin dielectric layer, the small particles and the propagating wave forms a mechanism to transfer sub-wavelength information about the particles to the far field. The smallest distinguished distance reaches to 0.634λ, when the imaging system is composed of a high numerical aperture (NA=0.9) lens and the illumination wavelength λ = 632nm, beyond the diffraction limit 0.678λ. The lateral resolution can be further improved by combining the proposed structure with superresolution microscopy techniques.

Optical angular momenta (AM) have attracted tremendous research interest in recent years. In this paper we theoretically investigate the electromagnetic field and angular momentum properties of tightly focused arbitrary cylindrical vortex vector (CVV) input beams. An absorptive particle is placed in focused CVV fields to analyze the optical torques. The spin-orbit motions of the particle can be predicted and controlled when the influences of different parameters, such as the topological charge, the polarization and the initial phases, are taken into account. These findings will be helpful in optical beam shaping, optical spin-orbit interaction and practical optical manipulation.

With dual two-dimensional Airy-like waveforms, we demonstrate the creation of highly confined electromagnetic fields in the transverse plane and circular or elliptical propagation trajectories in the longitudinal plane by using specially designed Pancharatnam-Berry (PB) phases. Applying the Richards and Wolf vectorial diffraction methods, the explicit expressions are obtained to calculate the strength vectors and energy flux of the three-dimensional electromagnetic fields. Calculations reveal that the nanointerferometric structures of such highly confined fields highly depend on the indexes γ₁ and γ₂ determining the PB phase, thereby enabling the engineering of highly confined fields with tunable size, spacing, and propagation trajectories.

Rigorous vectorial focusing theory is used to study the imaging of small adjacent particles with a confocal laser scanning system. We consider radially polarized illumination with an optimized amplitude distribution and an annular lens to obtain a narrower distribution of the longitudinal component of the field in focus. A polarization convertor at the detector side is added to transform radial polarization to linear polarization in order to make the signal detectable with a single mode fiber.

Scattering of light by a periodic array of metal-coated nanocylinders located on a dielectric slab is analyzed by using a semi-analytical method based on a recursive algorithm combined with the lattice sums technique. The resonance phenomena observed in the spectral responses of the scattered field are numerically investigated.