Complex roughening of Si under oblique bombardment by low-energy oxygen ions.
Journal Article
(2000)
Author(s)
PFA Alkemade (TU Delft - Old - sect Electronic Materials (NS/EM))
ZX Jiang (External organisation)
Research Group
Old - sect Electronic Materials (NS/EM)
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https://resolver.tudelft.nl/uuid:93a43afc-5f45-4f1e-b7c5-02ea70df22a5
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Publication Year
2000
Research Group
Old - sect Electronic Materials (NS/EM)
Issue number
5
Volume number
19
Pages (from-to)
1699-1705
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