A 6800-μm2 Resistor-Based Temperature Sensor in 180-nm CMOS
J. Angevare (TU Delft - Electronic Instrumentation)
Kofi A.A. Makinwa (TU Delft - Microelectronics)
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Abstract
A resistor-based temperature sensor has been realized in 180 nm CMOS for SoC thermal management applications. Occupying only 6800 μm2, it is the smallest resistor-based temperature sensor ever reported. This is achieved by employing a compact highly-digital VCO-based ADC. After a 2-point trim, the sensor achieves an inaccuracy of ±0.35 °C (3σ) in a temperature range from-35 °C to 125 °C. By achieving a resolution of 0.12 °C (rms) at 2.8kSa/s, it can track the fast thermal-transients in SoCs.