Low-Temperature Solid-Phase Epitaxy of Defect-Free Aluminum p+-doped Silicon for Nanoscale Device Applications
Conference Paper
(2006)
Author(s)
Y Civale (TU Delft - Electronic Components, Technology and Materials)
LK Nanver (TU Delft - Electronic Components, Technology and Materials)
P Hadley (TU Delft - QN/Mol. Electronics & Devices)
H. Zeijl (TU Delft - Electronic Components, Technology and Materials)
E.J.G. Goudena (TU Delft - Electronic Components, Technology and Materials)
H. Schellevis (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
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Publication Year
2006
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
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