Controlled Growth of Non-uniform Arsenic Profiles in Silicon RPCVD Epitaxial Layers
Journal Article
(2009)
Author(s)
M Popadic (TU Delft - Electronic Components, Technology and Materials)
T.L.M. Scholtes (TU Delft - Electronic Components, Technology and Materials)
WB De Boer (TU Delft - Electronic Components, Technology and Materials, TU Delft - Old - EWI Sect. ECTM)
F Sarubbi (TU Delft - Electronic Components, Technology and Materials)
Lis Nanver (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/DOI: 10.1007/s11664-009-0897-x
To reference this document use:
https://resolver.tudelft.nl/uuid:9855121b-320e-4184-a5df-9db55e96b564
More Info
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Publication Year
2009
Research Group
Electronic Components, Technology and Materials
Issue number
11
Volume number
38
Pages (from-to)
2323-2328
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