X-ray investigation of buried SiGe islands for devices with strain-enhanced mobility

Journal article (2009)

Authors

N Hrauda External organisation
JJ Zhang External organisation
J Stangl External organisation
A Rehman-Khan External organisation
G Bauer External organisation
M Stoffel External organisation
OG Schmist External organisation
V. Jovanovic Electronic Components, Technology and Materials - EEMCS
L.K. Nanver Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2009

Language

Undefined/Unknown

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials