X-ray investigation of buried SiGe islands for devices with strain-enhanced mobility

N Hrauda (External organisation)

JJ Zhang (External organisation)

J Stangl (External organisation)

A Rehman-Khan (External organisation)

G Bauer (External organisation)

M Stoffel (External organisation)

OG Schmist (External organisation)

V Jovanovic (TU Delft - Electronic Components, Technology and Materials)

L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)