Efficient Wafer Table Flatness Treatment via Smart Routing
J. Li (TU Delft - Electrical Engineering, Mathematics and Computer Science)
S. Nihtianov (TU Delft - Electronic Instrumentation)
M.A. Sharifi Kolarijani (TU Delft - Team Amin Sharifi Kolarijani)
More Info
expand_more
Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.
Abstract
As a component of lithography machine, the wafer table plays an important role during wafer
exposure. The surface flatness condition of the WT will cause focus and overlay errors during
exposure and directly affect wafer distortion levels. This project takes advantage of global genetic algorithm to successfully develop a routing optimization design tool in MATLAB to deliver an efficient routing for genetic wafer fingerprints.
Files
File under embargo until 31-08-2026