Patterning of polyimide and metal in deep trenches
Journal Article
(2001)
Author(s)
VG Kiutchoukov (External organisation)
JR Mollinger (TU Delft - Electronic Instrumentation)
M Shikida (External organisation)
A Bossche (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:9b292768-aa61-4e14-a78d-b7d49e2d6503
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Publication Year
2001
Research Group
Electronic Instrumentation
Volume number
92
Pages (from-to)
208-213
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