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A Low-Power MEMS IDE Capacitor with Integrated Microhotplate

Application as Methanol Sensor using a Metal-Organic Framework Coating as Affinity Layer

Journal Article (2019)
Authors

M. Ramachandrappa Venkatesh (TU Delft - Electronic Components, Technology and Materials)

S. Sachdeva (OLD ChemE/Organic Materials and Interfaces)

B. el Mansouri (TU Delft - Electronic Components, Technology and Materials)

J. Wei (TU Delft - EKL Processing)

A. Bossche (TU Delft - Electronic Instrumentation)

D. Bosma (TU Delft - ChemE/O&O groep)

Louis de Smet (Wageningen University & Research)

Ernst Sudhölter (OLD ChemE/Organic Materials and Interfaces)

G. Zhang (TU Delft - Electronic Components, Technology and Materials)

Research Group
Electronic Components, Technology and Materials
Copyright
© 2019 M. Ramachandrappa Venkatesh, S. Sachdeva, B. El Mansouri, J. Wei, A. Bossche, D. Bosma, L.C.P.M. de Smet, Ernst J. R. Sudhölter, Kouchi Zhang
To reference this document use:
https://doi.org/10.3390/s19040888
More Info
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Publication Year
2019
Language
English
Copyright
© 2019 M. Ramachandrappa Venkatesh, S. Sachdeva, B. El Mansouri, J. Wei, A. Bossche, D. Bosma, L.C.P.M. de Smet, Ernst J. R. Sudhölter, Kouchi Zhang
Research Group
Electronic Components, Technology and Materials
Issue number
4
Volume number
19
Pages (from-to)
1-19
DOI:
https://doi.org/10.3390/s19040888
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Abstract

Capacitors made of interdigitated electrodes (IDEs) as a transducer platform for the sensing of volatile organic compounds (VOCs) have advantages due to their lower power operation and fabrication using standard micro-fabrication techniques. Integrating a micro-electromechanical system (MEMS), such as a microhotplate with IDE capacitor, further allows study of the temperature- dependent sensing response of VOCs. In this paper, the design, fabrication, and characterization of a low-power MEMS microhotplate with IDE capacitor to study the temperature-dependent sensing response to methanol using Zeolitic imidazolate framework (ZIF-8), a class of metal-organic framework (MOF), is presented. A Titanium nitride (TiN) microhotplate with aluminum IDEs suspended on a silicon nitride membrane is fabricated and characterized. The power consumption of the ZIF-8 MOF-coated device at an operating temperature of 50 ∘ C is 4.5 mW and at 200 ∘ C it is 26 mW. A calibration methodology for the effects of temperature of the isolation layer between the microhotplate electrodes and the capacitor IDEs is developed. The device coated with ZIF-8 MOF shows a response to methanol in the concentration range of 500 ppm to 7000 ppm. The detection limit of the sensor for methanol vapor at 20 ∘ C is 100 ppm. In situ study of sensing properties of ZIF-8 MOF to methanol in the temperature range from 20 ∘ C to 50 ∘ C using the integrated microhotplate and IDE capacitor is presented. The kinetics of temperature-dependent adsorption and desorption of methanol by ZIF-8 MOF are fitted with double-exponential models. With the increase in temperature from 20 ∘ C to 50 ∘ C, the response time for sensing of methanol vapor concentration of 5000 ppm decreases by 28%, whereas the recovery time decreases by 70%.