Hydrogen injection in ETP plasma jet for fast-deposition of high-quality a-Si:H
Conference Paper
(2004)
Authors
AMHN Petit (TU Delft - Electronic Components, Technology and Materials)
René van Swaaij (TU Delft - Electronic Components, Technology and Materials)
MCM van de Sanden (External organisation)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/a49ec87b-e320-454a-822d-f8dc5d8f503e
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Publication Year
2004
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
1-6
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