Profile Engineering of Decreasing Arsenic Doping in Silicon RPCVD
Conference Paper
(2006)
Author(s)
M Popadic (TU Delft - Electronic Components, Technology and Materials)
F Sarubbi (TU Delft - Electronic Components, Technology and Materials)
TLM Scholtes (TU Delft - Electronic Components, Technology and Materials)
S Milosavljević (TU Delft - Electronic Components, Technology and Materials)
Wiebe de Boer (TU Delft - Electronic Components, Technology and Materials)
L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:a6dc47f2-a249-40e6-8fb8-f293bfd4f72a
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Publication Year
2006
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
475-478
ISBN (print)
90-73461-44-8
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