Profile Engineering of Decreasing Arsenic Doping in Silicon RPCVD

Popadic, M; Sarubbi, F; Scholtes, T.L.M.; Milosavljevic, S.; de Boer, Wiebe; Nanver, LK

Profile Engineering of Decreasing Arsenic Doping in Silicon RPCVD

Conference paper (2006)

Authors

M Popadic Electronic Components, Technology and Materials

F Sarubbi Electronic Components, Technology and Materials

T.L.M. Scholtes Electronic Components, Technology and Materials

S. Milosavljevic Electronic Components, Technology and Materials

Wiebe de Boer Electronic Components, Technology and Materials

LK Nanver Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2006

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Research Group

Electronic Components, Technology and Materials

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