Dual-beam excimer-laser induced Si grain size enlargement in an a-Si / structured SiO2 / metal stack
Conference Paper
(1999)
Author(s)
A Burtsev (External organisation)
R Ishihara (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:a9685f80-a6e4-40af-9519-f8262c86c337
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Publication Year
1999
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
665-670
ISBN (print)
90-73461-18-9
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