Dual-beam excimer-laser induced Si grain size enlargement in an a-Si / structured SiO2 / metal stack

Conference paper (1999)

Authors

A Burtsev External organisation
R. Ishihara Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

1999

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials