Flexible membrane sensor for opto-mechanical force transducer
Abstract
(2016)
Author(s)
Ronald Stoute (TU Delft - Electrical Engineering, Mathematics and Computer Science)
J. Muganda (External organisation)
Steven Beekmans (Vrije Universiteit Amsterdam)
Davide Iannuzzi (Vrije Universiteit Amsterdam)
Ronald Dekker (TU Delft - Electrical Engineering, Mathematics and Computer Science)
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:ab58614f-ffe0-4ec2-a086-75b8ddee1e30
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Publication Year
2016
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
103-104
Event
13th International Workshop on Nanomechanical Sensing (2016-06-22 - 2016-06-24), Delft, Netherlands
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