Depth resolution for Ge in Si with low energy and grazing O2+ beams
Conference Paper
(1998)
Author(s)
Paul Alkemade (TU Delft - Old - sect Electronic Materials (NS/EM))
ZX Jiang (External organisation)
R Badheka (External organisation)
JA van den Berg (External organisation)
DG Armour (External organisation)
Research Group
Old - sect Electronic Materials (NS/EM)
To reference this document use:
https://resolver.tudelft.nl/uuid:ad6ba375-ea41-4ef8-963d-ef3b14f63b98
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Publication Year
1998
Research Group
Old - sect Electronic Materials (NS/EM)
Pages (from-to)
275-278
ISBN (print)
0471978264
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