Compensation of High-Frequency Disturbances in Scanning Microscopes
Book Chapter
(2012)
Author(s)
P Kruit (TU Delft - ImPhys/Charged Particle Optics)
VF van Ravesteijn (TU Delft - ImPhys/Quantitative Imaging)
B Rieger (TU Delft - ImPhys/Quantitative Imaging)
F Berwald (TU Delft - ImPhys/Charged Particle Optics)
J.H.M. van der Linden (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:add1a05c-a164-4476-af92-94276cb15000
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Publication Year
2012
Research Group
ImPhys/Charged Particle Optics
Pages (from-to)
98-102
ISBN (print)
978-94-007-4146-1
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