Electron beam induced deposition and in-situ inspection of sub-10 nm structures
Conference Paper
(2004)
Author(s)
MJ van Bruggen (TU Delft - ImPhys/Charged Particle Optics)
W.F. van Dorp (TU Delft - ImPhys/Charged Particle Optics)
B van Someren (TU Delft - ImPhys/Charged Particle Optics)
N Silvis-Cividjian (TU Delft - ImPhys/Charged Particle Optics)
C.W. Hagen (TU Delft - ImPhys/Charged Particle Optics)
P. Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:ae2fa744-0645-4258-8f82-a133b0c179c4
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Publication Year
2004
Research Group
ImPhys/Charged Particle Optics
Pages (from-to)
175-176
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