Electron beam induced deposition and in-situ inspection of sub-10 nm structures

Conference paper (2004)

Authors

MJ van Bruggen ImPhys/Charged Particle Optics
W.F. van Dorp ImPhys/Charged Particle Optics
B van Someren ImPhys/Charged Particle Optics
N Silvis-Cividjian ImPhys/Charged Particle Optics
C.W. Hagen ImPhys/Charged Particle Optics
P. Kruit ImPhys/Charged Particle Optics
Research Group
ImPhys/Charged Particle Optics
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Published Date

2004

Language

Undefined/Unknown

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Research Group

ImPhys/Charged Particle Optics