Trenchfill with SiOF, uniformity of properties of interest over the wafer
Report
(1997)
Author(s)
DJ de Boer (External organisation)
AJ Kalkman (TU Delft - QN/Fysics of NanoElectronics)
G.C.A.M. Janssen (TU Delft - OLD Metals Processing, Microstructures and Properties)
S Radelaar (TU Delft - OLD Metals Processing, Microstructures and Properties)
Research Group
QN/Fysics of NanoElectronics
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Publication Year
1997
Research Group
QN/Fysics of NanoElectronics
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