Assessment of RDL Technology at Sub-THz Frequencies
C. Tadolini (TU Delft - Tera-Hertz Sensing)
T. Verduci (TNO, Chip Integration Technology Center)
E. Sopubekova (Chip Integration Technology Center, TNO)
F. Chiappini (Chip Integration Technology Center, TNO)
S. Monni (TNO)
P.M. Sberna (TU Delft - Tera-Hertz Sensing)
M. Spirito (TU Delft - Electronics)
N. Llombart (TU Delft - Tera-Hertz Sensing)
M. Alonso Del Pino (TU Delft - Tera-Hertz Sensing)
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Abstract
This contribution presents the assessment of RDL technology at sub-terahertz frequencies based on polybenzoxazole (PBO) polymers. A stack of two PBO layers of 10 thickness with 3 metallization of 5 copper is being under development. Vias as small as 10 and a separation of 60 are being explored. To assess the materials and capabilities of this technology, GCPW, stripline transmission line structures are being assessed, expecting losses in the order of 1.3dB/mm and 2.1dB/mm respectively. Moreover, two resonators have been designed to enhance the accuracy of the characterization.
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