Patterning of polyimide and metal in deep grooves
Conference Paper
(2000)
Author(s)
VG Kiutchoukov (External organisation)
JR Mollinger (TU Delft - Electronic Instrumentation)
A Bossche (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:b2a96bbd-3283-4e2a-ae21-77bd2053f5a2
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Publication Year
2000
Research Group
Electronic Instrumentation
Pages (from-to)
467-470
ISBN (print)
87-89935-50-0
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