The complex mechanisms of ion-beam-induced deposition

Journal Article (2008)
Author(s)

P Chen (QN/High Resolution Electron Microscopy)

Paul F.A. Alkemade (TU Delft - QN/Kavli Nanolab Delft)

Huub Salemink (TU Delft - QN/Photronic Devices)

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Publication Year
2008
Issue number
6
Volume number
47
Pages (from-to)
5123-5126

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