Electrical and optical properties of PECVD SiC thin films for surface micromachined devices
Conference Paper
(2002)
Author(s)
TMH Pham (TU Delft - Electronic Components, Technology and Materials)
T Akkaya (TU Delft - Electronic Components, Technology and Materials)
Charles de Boer (TU Delft - Electronic Components, Technology and Materials)
CCG Visser (TU Delft - Electronic Components, Technology and Materials)
Lina P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
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Publication Year
2002
Research Group
Electronic Components, Technology and Materials
Bibliographical Note
CD-ROM@en
Pages (from-to)
662-666
ISBN (print)
90-73461-33-2
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