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T
T Akkaya
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2 records found
Electrical and optical properties of PECVD SiC thin films for surface micromachined devices
Conference paper -
HTM Pham
,
T Akkaya
,
C.R. de Boer
,
C.C.G. Visser
,
Pasqualina M Sarro
Electrical characteristics of plasma-enhanced chemical vapor deposited silicon carbide thin films
Journal article -
HTM Pham
,
T Akkaya
,
C.R. de Boer
,
Pasqualina M Sarro