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T Akkaya

Conference paper (1)

Journal article (1)

2 records found

1

Electrical characteristics of plasma-enhanced chemical vapor deposited silicon carbide thin films

Journal article (2003) - HTM Pham (author) , T Akkaya (author) , Charles de Boer (author) , PM Sarro (author)

Electrical and optical properties of PECVD SiC thin films for surface micromachined devices

Conference paper (2002) - HTM Pham (author) , T Akkaya (author) , Charles De Boer (author) , C.C.G. Visser (author) , Pasqualina M Sarro (author)