A Continuous-Time Readout IC with 0.12 aF/√Hz for Capacitive Inertial Sensors

Conference Paper (2021)
Author(s)

H. Jiang (TU Delft - Electronic Instrumentation)

Yang Liu (Student TU Delft)

L.M. Middelburg (TU Delft - Electronic Components, Technology and Materials)

B. el Mansouri (TU Delft - Electronic Components, Technology and Materials)

S Nihtianov (TU Delft - Electronic Instrumentation)

Research Group
Electronic Instrumentation
DOI related publication
https://doi.org/10.1109/ICTA53157.2021.9661905
More Info
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Publication Year
2021
Language
English
Research Group
Electronic Instrumentation
Pages (from-to)
14-15
ISBN (print)
978-1-6654-1748-8
ISBN (electronic)
978-1-6654-1747-1

Abstract

This paper presents a continuous-time integrated readout interface for inertial sensors with high energy efficiency and high resolution. A dual digital-to-analog conversion (dual DAC) scheme is proposed which reduces the large DC baseline capacitance while preserving a high gain in the capacitance-to-voltage converter (CVC). A continuous-time delta-sigma modulator (CTΔΣM) is used to digitize the output signal of the CVC without kT/C noise. This results in a precision capacitive readout IC with a 5.5aF resolution in 0.5ms conversion time. It consumes 1.8mW. An inertial sensing system, consisting of the readout IC and a MEMS inertial sensor, achieves a resolution of 17.02ng/√Hz.

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