A Continuous-Time Readout IC with 0.12 aF/√Hz for Capacitive Inertial Sensors
H. Jiang (TU Delft - Electronic Instrumentation)
Yang Liu (Student TU Delft)
L.M. Middelburg (TU Delft - Electronic Components, Technology and Materials)
B. el Mansouri (TU Delft - Electronic Components, Technology and Materials)
S Nihtianov (TU Delft - Electronic Instrumentation)
More Info
expand_more
Abstract
This paper presents a continuous-time integrated readout interface for inertial sensors with high energy efficiency and high resolution. A dual digital-to-analog conversion (dual DAC) scheme is proposed which reduces the large DC baseline capacitance while preserving a high gain in the capacitance-to-voltage converter (CVC). A continuous-time delta-sigma modulator (CTΔΣM) is used to digitize the output signal of the CVC without kT/C noise. This results in a precision capacitive readout IC with a 5.5aF resolution in 0.5ms conversion time. It consumes 1.8mW. An inertial sensing system, consisting of the readout IC and a MEMS inertial sensor, achieves a resolution of 17.02ng/√Hz.
No files available
Metadata only record. There are no files for this record.