Tuning dynamics and dissipation dilution in 2D material resonators by MEMS-induced tension
M.P.F. Wopereis (TU Delft - Mechanical Engineering)
P. G. Steeneken (TU Delft - Dynamics of Micro and Nano Systems)
G.J. Verbiest (TU Delft - Dynamics of Micro and Nano Systems)
Farbod Alijani (TU Delft - Dynamics of Micro and Nano Systems)
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Abstract
Nanomechanical resonators made of two-dimensional (2D) materials are the subject of intensive research due to their remarkable properties, allowing them to operate at high frequencies with high sensitivity. However, dissipation losses and manufacturing issues have prevented them from reaching their full potential. This thesis aims to overcome these challenges by dry-transferring 2D materials onto a MEMS and clamping them using electron beam-induced deposition. By in-plane straining the membranes using MEMS, the tensile energy is increased, thereby diluting intrinsic losses. This approach increased the Q-factor of 2D material resonators by 91% and allowed measuring forces down to sub-piconewtons, outperforming commercially available silicon-based force sensors.