Wafer-Scale Transfer-Free Graphene MEMS Condenser Microphones
Roberto Pezone (TU Delft - Electronic Components, Technology and Materials)
Gabriele Baglioni (Kavli institute of nanoscience Delft, TU Delft - QN/van der Zant Lab)
Leonardo Di Paola (Student TU Delft)
Pasqualina M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Peter G. Steeneken (TU Delft - Dynamics of Micro and Nano Systems, Kavli institute of nanoscience Delft)
Sten Vollebregt (TU Delft - Electronic Components, Technology and Materials)
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Abstract
This paper outlines the first transfer-free multi-layer (ML-gr) graphene-based MEMS condenser microphone with a high aspect-ratio suitable for sensitive miniaturized portable microphones. This fabrication flow avoids thick polymers needed to realize suspended graphene-polymer heterostructures over air cavities, which generally limit the response by introducing higher mass and stiffness. Several devices are characterized both mechanically and electrically, showing pull-in voltages up to 9.5 V and resonance frequency limited bandwidths of up to 127 kHz. The work paves the way to realize next-generation graphene microphones with a 4.5x area reduction compared to current state-of-the-art MEMS microphones.