LD
Leonardo Di Paola
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1
Conference paper
(2023)
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Roberto Pezone, Gabriele Baglioni, Leonardo Di Paola , Pasqualina M. Sarro, Peter G. Steeneken, Sten Vollebregt
This paper outlines the first transfer-free multi-layer (ML-gr) graphene-based MEMS condenser microphone with a high aspect-ratio suitable for sensitive miniaturized portable microphones. This fabrication flow avoids thick polymers needed to realize suspended graphene-polymer heterostructures over air cavities, which generally limit the response by introducing higher mass and stiffness. Several devices are characterized both mechanically and electrically, showing pull-in voltages up to 9.5 V and resonance frequency limited bandwidths of up to 127 kHz. The work paves the way to realize next-generation graphene microphones with a 4.5x area reduction compared to current state-of-the-art MEMS microphones.
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This paper outlines the first transfer-free multi-layer (ML-gr) graphene-based MEMS condenser microphone with a high aspect-ratio suitable for sensitive miniaturized portable microphones. This fabrication flow avoids thick polymers needed to realize suspended graphene-polymer heterostructures over air cavities, which generally limit the response by introducing higher mass and stiffness. Several devices are characterized both mechanically and electrically, showing pull-in voltages up to 9.5 V and resonance frequency limited bandwidths of up to 127 kHz. The work paves the way to realize next-generation graphene microphones with a 4.5x area reduction compared to current state-of-the-art MEMS microphones.