High-resistivity polycrystalline silicon as rf substrate in wafer-level packaging
Journal Article
(2005)
Author(s)
A Poliakov (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
SM Sinaga (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
P Mendes (TU Delft - Electronic Components, Technology and Materials)
M Bartek (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
J.H. Correia (External organisation)
JN Burghartz (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
Research Group
Old - EWI Ch. Integrated Sensing Devices
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https://resolver.tudelft.nl/uuid:b97e34ac-2a3b-49fd-9202-2e795f7f4c58
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Publication Year
2005
Research Group
Old - EWI Ch. Integrated Sensing Devices
Issue number
2
Volume number
41
Pages (from-to)
100-101
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