High-resistivity polycrystalline silicon as rf substrate in wafer-level packaging

Journal article (2005)

Authors

A Poliakov Old - EWI Ch. Integrated Sensing Devices
SM Sinaga Old - EWI Ch. Integrated Sensing Devices
P Mendes Electronic Components, Technology and Materials - EEMCS
M. Bartek Old - EWI Ch. Integrated Sensing Devices
JH Correia External organisation
JN Burghartz Old - EWI Ch. Integrated Sensing Devices
Research Group
Old - EWI Ch. Integrated Sensing Devices
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Published Date

2005

Language

Undefined/Unknown

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Research Group

Old - EWI Ch. Integrated Sensing Devices