Prediction of thermo-mechanical integrity of wafer backend processes
Journal Article
(2004)
Author(s)
V Gonda (TU Delft - Dynamics of Micro and Nano Systems)
JMJ den Toonder (External organisation)
J Beijer (External organisation)
GQ Zhang (External organisation)
WD van Driel (External organisation)
ROJM Hoofman (External organisation)
LJ Ernst (TU Delft - Dynamics of Micro and Nano Systems)
Research Group
Dynamics of Micro and Nano Systems
To reference this document use:
https://resolver.tudelft.nl/uuid:b9ee304d-52a5-4dd2-a169-9c5bb312e103
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Publication Year
2004
Research Group
Dynamics of Micro and Nano Systems
Volume number
44
Pages (from-to)
2011-2017
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