High effective gummel number of CVD boron layers in ultrashallow p+n diode configurations
Journal Article
(2010)
Author(s)
F Sarubbi (TU Delft - Electronic Components, Technology and Materials)
L.K. Nanver (TU Delft - Electronic Components, Technology and Materials)
T.L.M. Scholtes (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1109/TED.2010.2045672
To reference this document use:
https://resolver.tudelft.nl/uuid:baf73e86-4f04-48b6-a69e-feebc6ef9b31
More Info
expand_more
expand_more
Publication Year
2010
Language
English
Research Group
Electronic Components, Technology and Materials
Issue number
6
Volume number
57
Pages (from-to)
1269-1278
No files available
Metadata only record. There are no files for this record.