Capacitive Sensing System Design for a rotating AMB with sub-nanometer positioning accuracy

Conference paper (2006)

Authors

PM Overschie Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

L Jabben Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

J.P. van Schieveen Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

J.W. Spronck Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

J. van Eijk Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

Research Group

Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)

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Published Date

2006

Language

Undefined/Unknown

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design