Capacitive Sensing System Design for a rotating AMB with sub-nanometer positioning accuracy
Conference Paper
(2006)
Author(s)
PM Overschie (TU Delft - Mechatronic Systems Design)
L Jabben (TU Delft - Mechatronic Systems Design)
J.P. van Schieveen (TU Delft - Mechatronic Systems Design)
Jo Spronck (TU Delft - Mechatronic Systems Design)
J. van Eijk (TU Delft - Mechatronic Systems Design)
Research Group
Mechatronic Systems Design
To reference this document use:
https://resolver.tudelft.nl/uuid:c050dd67-e071-4688-9ca3-f209d4a79150
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Publication Year
2006
Research Group
Mechatronic Systems Design
Pages (from-to)
1-6
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