Photoacoustic raster scan imaging using an optomechanical ultrasound sensor in silicon photonics
Cedric Pieters (IMEC-Solliance)
Wouter J. Westerveld (IMEC-Solliance, TU Delft - Mechanical Engineering)
Hasan Mahmud-Ul-Hasan (IMEC-Solliance)
Simone Severi (IMEC-Solliance)
Jon Kjellman (IMEC-Solliance)
Roelof Jansen (IMEC-Solliance)
Veronique Rochus (IMEC-Solliance)
Xavier Rottenberg (IMEC-Solliance)
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Abstract
Photoacoustic tomography defines new challenges for ultrasound detection compared to ultrasonography. To address these challenges, a sensitive, small, scalable, and broadband optomechanical ultrasound sensor (OMUS) has been developed. The OMUS is an on-chip optical ultrasound sensor, using optical interferometric ultrasound detection. It consists of an acoustic membrane on top of an optical ring resonator that modulates the optical ring resonance with high efficiency enabled by an innovative optomechanical waveguide. Raster scanning photoacoustic tomography has been demonstrated with a single-element OMUS. Based on performance and form factor, the OMUS combined with passive optical multiplexing may enable new applications in photoacoustic imaging.