Roles of secondary electrons and sputtered atoms in Ion-Beam-Induced Deposition

Journal article (2009)

Authors

P Chen QN/Kavli Nanolab Delft - AS
H.W.M. Salemink QN/Photronic Devices
P.F.A. Alkemade QN/Kavli Nanolab Delft - AS
Research Group
QN/Kavli Nanolab Delft (AS) (TU Delft)
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Published Date

2009

Language

Undefined/Unknown

Reuse Rights

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Faculty

Applied Sciences

Department

QN/Quantum Nanoscience

Research Group

QN/Kavli Nanolab Delft