Roles of secondary electrons and sputtered atoms in Ion-Beam-Induced Deposition
Journal Article
(2009)
Author(s)
P Chen (TU Delft - QN/Kavli Nanolab Delft)
Huub Salemink (TU Delft - QN/Photronic Devices)
Paul F.A. Alkemade (TU Delft - QN/Kavli Nanolab Delft)
Research Group
QN/Kavli Nanolab Delft
To reference this document use:
https://resolver.tudelft.nl/uuid:c1074526-d6d9-4013-a76c-2e4a89960ac4
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Publication Year
2009
Research Group
QN/Kavli Nanolab Delft
Issue number
6
Volume number
27
Pages (from-to)
2718-2721
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