Roles of secondary electrons and sputtered atoms in Ion-Beam-Induced Deposition

Chen, P; Salemink, H.W.M.; Alkemade, Paul

Roles of secondary electrons and sputtered atoms in Ion-Beam-Induced Deposition

Journal article (2009)

Authors

P Chen QN/Kavli Nanolab Delft

H.W.M. Salemink QN/Photronic Devices

Paul Alkemade QN/Kavli Nanolab Delft

Research Group

QN/Kavli Nanolab Delft

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Published Date

2009

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Research Group

QN/Kavli Nanolab Delft

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