As peaks in Si (100) films fabricated with rapid thermal epitaxy
Conference Paper
(1999)
Author(s)
WD van Noort (TU Delft - Electronic Components, Technology and Materials)
Lis Nanver (TU Delft - Electronic Components, Technology and Materials)
CCG Visser (TU Delft - Electronic Components, Technology and Materials)
A van Bogaard (TU Delft - Electronic Components, Technology and Materials)
JW Slotboom (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:c7e888e3-7f68-4e00-b2fe-e7b671e14a46
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Publication Year
1999
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
335-342
ISBN (print)
1-56677-232-X
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