As peaks in Si (100) films fabricated with rapid thermal epitaxy

Conference paper (1999)

Authors

WD van Noort Electronic Components, Technology and Materials - EEMCS
L.K. Nanver Electronic Components, Technology and Materials - EEMCS
C.C.G. Visser Electronic Components, Technology and Materials - EEMCS
A. van den Bogaard Electronic Components, Technology and Materials - EEMCS
JW Slotboom Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

1999

Language

Undefined/Unknown

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials