Zernike generation with a non-contact, thermally actuated deformable mirror
G.J.M. Schutten (TU Delft - Mechatronic Systems Design)
R. Saathof (TU Delft - Mechatronic Systems Design)
J. W. Spronck (TU Delft - Mechatronic Systems Design)
RH Munnig Schmidt (TU Delft - Mechatronic Systems Design)
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Abstract
Wavefront aberrations are commonly expressed in a series of orthogonal Zernike polynomial terms [1]. Each of these Zernike polynomials mathematically describes a certain typical deviation from an ideal wavefront. To correct for optical aberrations a deformable mirror must be able to actuate the shapes corresponding to these terms. This paper presents the results of experiments to actuate a deformable mirror surface, using a non-contact thermal actuation principle. Thermal radiation induces a temperature distribution on the mirror substrate which causes mirror surface deformation. In the experiments, shapes are actuated up to Z3³ with amplitudes ~ 60 [nm] and ~ 3 [nm] root mean square (RMS) shape error.
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