Estimating deformation of a free floating wafer chuck
Conference Paper
(2014)
Author(s)
Johan Vogel (TU Delft - Mechatronic Systems Design)
J. W. Spronck (TU Delft - Mechatronic Systems Design)
RH Munnig Schmidt (TU Delft - Mechatronic Systems Design)
Research Group
Mechatronic Systems Design
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https://resolver.tudelft.nl/uuid:c93ae6f6-0bf2-400e-b7ec-9c0d3c076838
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Publication Year
2014
Language
English
Research Group
Mechatronic Systems Design
Pages (from-to)
285-288
ISBN (print)
978-0-9566790-3-1
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