Low thermal budget Si epitaxy an overview study of the substrate/epi interface in a number of common epitaxial growth systems
Conference Paper
(1996)
Author(s)
M Caymax (External organisation)
L Vescan (External organisation)
K Werner (TU Delft - QN/Fysics of NanoElectronics)
D Bensahel (External organisation)
D Gravestijn (External organisation)
I Szendró (External organisation)
Research Group
QN/Fysics of NanoElectronics
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https://resolver.tudelft.nl/uuid:ccaf2fa1-0579-4975-ae93-0889a42c9dc5
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Publication Year
1996
Research Group
QN/Fysics of NanoElectronics
Pages (from-to)
83-86
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