6 records found
1
Annealing experiments on supercritical Si1-xGex layers grown by RPCVD
The influence of growth kinetics on the relaxation of epitaxially grown RPCVD SI1-x GEx
Annealing experiments on supercritical Si1-xGEx layers grown by RPCVD
The influence of growth kinetics on the relaxation of epitaxially grown RPCVD Si1-xGex
Annual report TMR network Aapples
Low thermal budget Si epitaxy an overview study of the substrate/epi interface in a number of common epitaxial growth systems